What Is A Planar Target?

- Jul 20, 2017-

Sputtering target material can be divided into plane target material, multiple arc target material and rotating target material according to shape. The planar target material refers to a certain thickness of the circular target material and rectangular target material, for example: 100 * diameter of 40mm copper target. The planar target material is connected with the sputtering equipment by means of the screw, and the sputtering film layer is attached to the substrate under the vacuum condition, and then the film is processed by various methods (etching) to meet different needs.